These beams are then combined in cascaded LBO (lithium triborate, LiB 3 O 5) crystals to produce the desired 193-nm laser, achieving an average power of 70 milliwatts and a linewidth of less than ...

Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...