A technical paper titled “Make the impossible possible: use variable-shaped beam mask writers and curvilinear full-chip inverse lithography technology for 193i contacts/vias with mask-wafer ...

Curvilinear overlays enhance the ... and amethyst purple accents throughout. Lead Product Line Manager Scottie Gurwitz shared, “Inverse is a deep dive into a new design mindset.

Inverse lithography technology (ILT ... Another challenge is the compute power required to calculate the shapes. Curvilinear ILT masks are one of several types of photomasks, which are critical ...