MEMS are mechanical sensors and actuators that are fabricated using micromachining ... MEMS takes advantage of other material properties like optical, mechanical, thermal, magnetic, chemical, etc.

Microelectromechanical systems (MEMS) are tiny devices that integrate various components, such as miniature sensors, electronics and actuators ... such as Magnetic Force Microscopy (MFM) or ...

and other MEMS components to enable precise control and movement at the microscale. Nanoactuators can be employed in targeted drug delivery systems. They can be designed to respond to specific stimuli ...

Total MEMS-based semiconductor sales—sensors and actuators—are forecast to grow 14% in 2014 to reach a new record-high of $8.0 billion, surpassing the current annual peak of $7.1 billion set in 2011, ...

but we could see multiple uses for robotics or small machines. We’ve seen some other neat DIY magnetic actuators before, too. Video after the break.