Metrology is the science of precise measurement. It ensures accuracy and consistency across scientific, industrial, and engineering fields. Calibration is the process of aligning measurement ...

Lixin Guo from Xidian University have shared their perspectives on the past and future of optical metrology involving orbital angular momentum (OAM). The paper explores fundamental principles ...

It shows a line profile drawn on top of an SEM image of a photoresist line. (Image: Hitachi High-Tech) CD-SEM is an essential metrology tool in semiconductor manufacturing for process control and ...