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Lam Research Corporation (LRCX) Unveils ALTUS Halo, Industry-First Molybdenum Deposition Tool for Advanced Chipsetch, and cleaning solutions. On February 19, Lam Research introduced ALTUS Halo, the first atomic layer deposition tool using molybdenum for advanced semiconductor manufacturing. The technology ...
Sophisticated etch uniformity controls ensure wafer-to ... and the separately announced ALTUS® Halo, the world's first molybdenum atomic layer deposition tool in production, further demonstrate ...
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