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SANTA CLARA, Calif. – Applied Materials Inc.'s AKT unit here today announced a new plasma-enhanced chemical vapor deposition (PECVD) system for use in developing fifth-generation, flat-panel displays.
Today, our competence extends to vacuum coatings, such as PECVD coating systems developed by Manz. Vacuum technology is used in many high-tech markets. It is the key to trailblazing innovation in ...
To deposit the AlOx layer it utilized an industrial batch-type LF-PECVD system provided by German PV equipment manufacturer Centrotherm, whose researchers also contributed to the research.
--(BUSINESS WIRE)--Oct. 29, 2001--AKT, an Applied Materials company and the world's leading supplier of plasma-enhanced chemical vapor deposition (PECVD) systems to the flat panel display ...
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