MEMS devices can vary from simple structures with no moving elements, to extremely complex electromechanical microsystems with several moving elements under the control of integrated microelectronics.

In a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized ...

A new on-chip sensor using twisted moiré photonic crystals can precisely tune light properties in real time. This could ...

Modelling and simulation (M&S) is used by engineers to accurately model and analyse MEMS devices for better designs. In this eBook, we share the stories of four teams from around the world that used ...

Microelectromechanical systems (MEMS) technology has allowed the realization of cost-effective, high-performance deformable mirrors for adaptive-optics-enhanced imaging. The idea of using an array ...

However, as things shrink to microscopic scales, transistors don’t work well, and you often find — full circle — mechanical devices. [Breaking Taps] has an investigation of a MEMS chip.

The GEMINI equipment platform includes a newly designed high-force bond chamber that ensures bond quality and yield for MEMS devices built on larger wafers. EVG has already delivered several GEMINI ...

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