Modern semiconductor fabrication involves aligning silicon wafers and photolithography masks to nanometre precision. As the industry shifts from using 200 mm diameter wafers to 300 mm wafers, ...

The etching and characterization room contains a suite of tools for dry etching and characterization of samples. This includes three dry etchers with a range of capabilities, while characterization ...

“We took a lot of the key IP and capability established in the bevel etch system, like the best-in-class precision wafer centering and plasma shaping technology, and applied it to the edge deposition ...

This report examines key etch steps in 3D NAND ... especially because multi-tiered NAND fabrication subsequently requires wafer thinning, precise alignment, and hybrid bonding to the next tier. Not ...

The negatively charged and extremely reactive fluorine ions are attracted to the wafer, where they attack and etch away the surfaces that aren’t protected by a photoresist layer. It all sounds ...

NexGen Wafer Systems is excited to announce the launch of SERENO, its latest multi-chamber platform designed for Wet Etch and ...

Watch as the silicon wafers go through complex manufacturing steps such as etching, doping, and layering to create the intricate circuits that make microchips function. Learn how advanced ...